Metal plasma immersion ion implantation and deposition: A review LBNL-38910 DE97 001256 CONF-96092692

Metal plasma immersion ion implantation and deposition: A review

LBNL-38910 DE97 001256 CONF-96092692

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Material Type: 規格・テクニカルリポート類
Title: Metal plasma immersion ion implantation and deposition: A review
Author/Editor: Anders, A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 33 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBNL-38910
テクニカルリポート番号 : DE97 001256
テクニカルリポート番号 : CONF-96092692
Holding library: 国立国会図書館
Call No.: LS-DE97/001256
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005871699
http://id.ndl.go.jp/bib/000005871699
Bibliographic Record Category (NDL): 291