Lowering of intralevel capacitance using air gap structures SAND-96-2309C DE96 015195 CONF-96092741

Lowering of intralevel capacitance using air gap structures

SAND-96-2309C DE96 015195 CONF-96092741

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Material Type: 規格・テクニカルリポート類
Title: Lowering of intralevel capacitance using air gap structures
Author/Editor: Fleming, J. G
Roherty-Osmun-E
Farino, A. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2309C
テクニカルリポート番号 : DE96 015195
テクニカルリポート番号 : CONF-96092741
Holding library: 国立国会図書館
Call No.: LS-DE96/015195
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005871734
http://id.ndl.go.jp/bib/000005871734
Bibliographic Record Category (NDL): 291