High energy metal ion implantation using 'Magis', a novel, broad-beam, Marx-generator-based ion source LBL-38512 DE97 000914 CONF-96099412

High energy metal ion implantation using 'Magis', a novel, broad-beam, Marx-generator-based ion source

LBL-38512 DE97 000914 CONF-96099412

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Material Type: 規格・テクニカルリポート類
Title: High energy metal ion implantation using 'Magis', a novel, broad-beam, Marx-generator-based ion source
Author/Editor: Anders, A
Brown, I. G
Dickinson, M. R
MacGill, R. A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 18 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL-38512
テクニカルリポート番号 : DE97 000914
テクニカルリポート番号 : CONF-96099412
Holding library: 国立国会図書館
Call No.: LS-DE97/000914
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005872122
http://id.ndl.go.jp/bib/000005872122
Bibliographic Record Category (NDL): 291