Evaluation of post-ashed photoresist cleaning using oxidizing chemistries SAND-97-1956C DE97 008364 CONF-9708054

Evaluation of post-ashed photoresist cleaning using oxidizing chemistries

SAND-97-1956C DE97 008364 CONF-9708054

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Material Type: 規格・テクニカルリポート類
Title: Evaluation of post-ashed photoresist cleaning using oxidizing chemistries
Author/Editor: Resnick, P. J
Matlock, C. A
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-1956C
テクニカルリポート番号 : DE97 008364
テクニカルリポート番号 : CONF-9708054
Holding library: 国立国会図書館
Call No.: LS-DE97/008364
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005877359
http://id.ndl.go.jp/bib/000005877359
Bibliographic Record Category (NDL): 291