Report of work done for technical assistance agreement 1269 between Sandia National Laboratories and the Watkins-Johnson Company: Chemical reaction mechanisms for computational models of SiO(sub 2) CVD SAND-97-2328 DE98 001217

Report of work done for technical assistance agreement 1269 between Sandia National Laboratories and the Watkins-Johnson Company: Chemical reaction mechanisms for computational models of SiO(sub 2) CVD

SAND-97-2328 DE98 001217

Call No. (NDL): LS-DE98/001217
Bibliographic ID of National Diet Library: 000005877450

Material type: 規格・テクニカルリポート類

Author: Ho, Pほか

Publisher: -

Publication date: 1997

Material Format: Microform

Capacity, size, etc.: 29 p. (1 microfiche)

NDC: -

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Material Type: 規格・テクニカルリポート類
Title: Report of work done for technical assistance agreement 1269 between Sandia National Laboratories and the Watkins-Johnson Company: Chemical reaction mechanisms for computational models of SiO(sub 2) CVD
Author/Editor: Ho, P
Johannes, J
Kudriavtsev, V
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 29 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-2328
テクニカルリポート番号 : DE98 001217
Holding library: 国立国会図書館
Call No.: LS-DE98/001217
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005877450
http://id.ndl.go.jp/bib/000005877450
Bibliographic Record Category (NDL): 291