Routes to failure in rotating MEMS devices experiencing sliding friction SAND-97-1734C DE97 007264 CONF-970968-6

Routes to failure in rotating MEMS devices experiencing sliding friction

SAND-97-1734C DE97 007264 CONF-970968-6

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Material Type: 規格・テクニカルリポート類
Title: Routes to failure in rotating MEMS devices experiencing sliding friction
Author/Editor: Miller, S. L
LaVigne, G
Rodgers, M. S
Sniegowski, J. J
Waters, J. P
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-1734C
テクニカルリポート番号 : DE97 007264
テクニカルリポート番号 : CONF-970968-6
Holding library: 国立国会図書館
Call No.: LS-DE97/007264
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005877485
http://id.ndl.go.jp/bib/000005877485
Bibliographic Record Category (NDL): 291