Improved Design of Optical MEMS Using the SUMMiT Fabrication Process SAND-97-2997C DE98 001369 CONF-980514

Improved Design of Optical MEMS Using the SUMMiT Fabrication Process

SAND-97-2997C DE98 001369 CONF-980514

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Material Type: 規格・テクニカルリポート類
Title: Improved Design of Optical MEMS Using the SUMMiT Fabrication Process
Author/Editor: Michalicek, M. A
Comtois, J. H
Barron, C. C
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-2997C
テクニカルリポート番号 : DE98 001369
テクニカルリポート番号 : CONF-980514
Holding library: 国立国会図書館
Call No.: LS-DE98/001369
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005880693
http://id.ndl.go.jp/bib/000005880693
Bibliographic Record Category (NDL): 291