Seventh Workshop on The Role of Impurities and Defects in Silicon Device Processing CONF-970875-SUMM DE98 001228 NREL/CP-52023549

Seventh Workshop on The Role of Impurities and Defects in Silicon Device Processing

CONF-970875-SUMM DE98 001228 NREL/CP-52023549

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Material Type: 規格・テクニカルリポート類
Title: Seventh Workshop on The Role of Impurities and Defects in Silicon Device Processing
Author/Editor: Sopori, B
Swanson, R
Tan, T
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 17 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : CONF-970875-SUMM
テクニカルリポート番号 : DE98 001228
テクニカルリポート番号 : NREL/CP-52023549
Holding library: 国立国会図書館
Call No.: LS-DE98/001228
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005880697
http://id.ndl.go.jp/bib/000005880697
Bibliographic Record Category (NDL): 291