Patterning of GaN in high-density Cl2 - and BCl3 - based plasmas SAND-97-1038C DE97 005366 CONF-9703025

Patterning of GaN in high-density Cl2 - and BCl3 - based plasmas

SAND-97-1038C DE97 005366 CONF-9703025

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Material Type: 規格・テクニカルリポート類
Title: Patterning of GaN in high-density Cl2 - and BCl3 - based plasmas
Author/Editor: Shul, R. J
Briggs, R. D
Han, J
Pearton, S. J
Lee, J. W
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 13 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-1038C
テクニカルリポート番号 : DE97 005366
テクニカルリポート番号 : CONF-9703025
Holding library: 国立国会図書館
Call No.: LS-DE97/005366
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005880927
http://id.ndl.go.jp/bib/000005880927
Bibliographic Record Category (NDL): 291