Fabricating micro-instruments in surface-micromachined polycrystalline silicon SAND-97-0718C DE97 004034 CONF-9705462

Fabricating micro-instruments in surface-micromachined polycrystalline silicon

SAND-97-0718C DE97 004034 CONF-9705462

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Material Type: 規格・テクニカルリポート類
Title: Fabricating micro-instruments in surface-micromachined polycrystalline silicon
Author/Editor: Comtois, J. H
Michalicek, M. A
Barron, C. C
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-0718C
テクニカルリポート番号 : DE97 004034
テクニカルリポート番号 : CONF-9705462
Holding library: 国立国会図書館
Call No.: LS-DE97/004034
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005881110
http://id.ndl.go.jp/bib/000005881110
Bibliographic Record Category (NDL): 291