Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT DOE/ER/13727-T4 DE97 003695

Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT

DOE/ER/13727-T4 DE97 003695

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Material Type: 規格・テクニカルリポート類
Title: Dynamics of electronegative plasmas for materials processing. Final report. PROGRESS REPT
Author/Editor: Lichtenberg, A. J
Lieberman, M. A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : DOE/ER/13727-T4
テクニカルリポート番号 : DE97 003695
Holding library: 国立国会図書館
Call No.: LS-DE97/003695
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005881213
http://id.ndl.go.jp/bib/000005881213
Bibliographic Record Category (NDL): 291