Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon SAND-97-2533C DE98 000559 CONF-971088

Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon

SAND-97-2533C DE98 000559 CONF-971088

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Material Type: 規格・テクニカルリポート類
Title: Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon
Author/Editor: Comtois, J. H
Michalicek, A
Barron, C. C
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 20 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-2533C
テクニカルリポート番号 : DE98 000559
テクニカルリポート番号 : CONF-971088
Holding library: 国立国会図書館
Call No.: LS-DE98/000559
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005882958
http://id.ndl.go.jp/bib/000005882958
Bibliographic Record Category (NDL): 291