Micromechanical structures and microelectronics for acceleration sensing SAND-97-0588C DE97 007153 CONF-9709684

Micromechanical structures and microelectronics for acceleration sensing

SAND-97-0588C DE97 007153 CONF-9709684

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Material Type: 規格・テクニカルリポート類
Title: Micromechanical structures and microelectronics for acceleration sensing
Author/Editor: Davies, B. R
Montague, S
Smith, J. H
Lemkin, M
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-0588C
テクニカルリポート番号 : DE97 007153
テクニカルリポート番号 : CONF-9709684
Holding library: 国立国会図書館
Call No.: LS-DE97/007153
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005883222
http://id.ndl.go.jp/bib/000005883222
Bibliographic Record Category (NDL): 291