Thermal stability of fluorinated SiO(sub 2) films: Effects of hydration and film-substrate interaction SAND-97-1628C DE97 007141 CONF-961202120

Thermal stability of fluorinated SiO(sub 2) films: Effects of hydration and film-substrate interaction

SAND-97-1628C DE97 007141 CONF-961202120

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Material Type: 規格・テクニカルリポート類
Title: Thermal stability of fluorinated SiO(sub 2) films: Effects of hydration and film-substrate interaction
Author/Editor: Sullivan, J. P
Barbour, J. C
Newcomer, P. P
Apblett, C. A
Seager, C. H
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-1628C
テクニカルリポート番号 : DE97 007141
テクニカルリポート番号 : CONF-961202120
Holding library: 国立国会図書館
Call No.: LS-DE97/007141
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005884023
http://id.ndl.go.jp/bib/000005884023
Bibliographic Record Category (NDL): 291