High energy implantation with high-charge-state ions in a vacuum arc ion implanter LBL38513 DE98 058295 CONF960994

High energy implantation with high-charge-state ions in a vacuum arc ion implanter

LBL38513 DE98 058295 CONF960994

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Material Type: 規格・テクニカルリポート類
Title: High energy implantation with high-charge-state ions in a vacuum arc ion implanter
Author/Editor: Oks, E. M
Anders, A
Brown, I. G
Dickinson, M. R
MacGill, R. A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL38513
テクニカルリポート番号 : DE98 058295
テクニカルリポート番号 : CONF960994
Holding library: 国立国会図書館
Call No.: LS-DE98/058295
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005893879
http://id.ndl.go.jp/bib/000005893879
Bibliographic Record Category (NDL): 291