Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering UCRLJC130782 DE98 057690 CONF980405

Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering

UCRLJC130782 DE98 057690 CONF980405

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Material Type: 規格・テクニカルリポート類
Title: Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering
Author/Editor: Nguyen, T. D
Barbee, T. W
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRLJC130782
テクニカルリポート番号 : DE98 057690
テクニカルリポート番号 : CONF980405
Holding library: 国立国会図書館
Call No.: LS-DE98/057690
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005893975
http://id.ndl.go.jp/bib/000005893975
Bibliographic Record Category (NDL): 291