Ion-implantation doping of silicon carbide ORNLCP95077 DE98 003167 CONF971213

Ion-implantation doping of silicon carbide

ORNLCP95077 DE98 003167 CONF971213

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Material Type: 規格・テクニカルリポート類
Title: Ion-implantation doping of silicon carbide
Author/Editor: Gardner, J
Edwards, A
Rao, M. V
Papanicolaou, N
Kelner, G
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : ORNLCP95077
テクニカルリポート番号 : DE98 003167
テクニカルリポート番号 : CONF971213
Holding library: 国立国会図書館
Call No.: LS-DE98/003167
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005894403
http://id.ndl.go.jp/bib/000005894403
Bibliographic Record Category (NDL): 291