Manufacturing method for multi-layer polysilicon surface-micromachining technology SAND980067C DE98 002723 CONF980328

Manufacturing method for multi-layer polysilicon surface-micromachining technology

SAND980067C DE98 002723 CONF980328

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Manufacturing method for multi-layer polysilicon surface-micromachining technology
Author/Editor: Sniegowski, J. J
Rodgers, M. S
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980067C
テクニカルリポート番号 : DE98 002723
テクニカルリポート番号 : CONF980328
Holding library: 国立国会図書館
Call No.: LS-DE98/002723
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005894436
http://id.ndl.go.jp/bib/000005894436
Bibliographic Record Category (NDL): 291