Chemical kinetics models for semiconductor processing SAND971828C DE98 002574

Chemical kinetics models for semiconductor processing

SAND971828C DE98 002574

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Material Type: 規格・テクニカルリポート類
Title: Chemical kinetics models for semiconductor processing
Author/Editor: Coltrin, M. E
Creighton, J. R
Meeks, E
Grcar, J. F
Houf, W. G
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND971828C
テクニカルリポート番号 : DE98 002574
Holding library: 国立国会図書館
Call No.: LS-DE98/002574
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005894464
http://id.ndl.go.jp/bib/000005894464
Bibliographic Record Category (NDL): 291