Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching SAND981777C DE98 007249 CONF980918

Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching

SAND981777C DE98 007249 CONF980918

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Material Type: 規格・テクニカルリポート類
Title: Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching
Author/Editor: Manginell, R. P
Frye-Mason, G. C
Schubert, W. K
Shul, R. J
Willison, C. G
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981777C
テクニカルリポート番号 : DE98 007249
テクニカルリポート番号 : CONF980918
Holding library: 国立国会図書館
Call No.: LS-DE98/007249
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005896045
http://id.ndl.go.jp/bib/000005896045
Bibliographic Record Category (NDL): 291