Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918

Thin teflon-like films for MEMS: Film properties and reliability studies

SAND980109C DE98 003931 CONF980918

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Material Type: 規格・テクニカルリポート類
Title: Thin teflon-like films for MEMS: Film properties and reliability studies
Author/Editor: Smith, B. K
LaVigne, G
Sniegowski, J. J
Brown, C. D
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980109C
テクニカルリポート番号 : DE98 003931
テクニカルリポート番号 : CONF980918
Holding library: 国立国会図書館
Call No.: LS-DE98/003931
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005896351
http://id.ndl.go.jp/bib/000005896351
Bibliographic Record Category (NDL): 291