Lubrication of polysilicon micromechanisms with self-assembled monolayers SAND980848C DE98 004530 CONF980638

Lubrication of polysilicon micromechanisms with self-assembled monolayers

SAND980848C DE98 004530 CONF980638

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Material Type: 規格・テクニカルリポート類
Title: Lubrication of polysilicon micromechanisms with self-assembled monolayers
Author/Editor: Inivasan, U
Foster, J. D
Habib, U
Howe, R. T
Maboudian, R
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980848C
テクニカルリポート番号 : DE98 004530
テクニカルリポート番号 : CONF980638
Holding library: 国立国会図書館
Call No.: LS-DE98/004530
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005897341
http://id.ndl.go.jp/bib/000005897341
Bibliographic Record Category (NDL): 291