Role of implantation damage in the production of silicon-on- insulator films by co-Implantation of He(sup +) and H(sup +) ORNLCP96086 DE98 004113 CONF980528

Role of implantation damage in the production of silicon-on- insulator films by co-Implantation of He(sup +) and H(sup +)

ORNLCP96086 DE98 004113 CONF980528

Call No. (NDL): LS-DE98/004113
Bibliographic ID of National Diet Library: 000005909114

Material type: 規格・テクニカルリポート類

Author: Venezia, V. Cほか

Publisher: -

Publication date: 1998

Material Format: Microform

Capacity, size, etc.: 13 p. (1 microfiche)

NDC: -

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Material Type: 規格・テクニカルリポート類
Title: Role of implantation damage in the production of silicon-on- insulator films by co-Implantation of He(sup +) and H(sup +)
Author/Editor: Venezia, V. C
Agarwal, A
Haynes, T. E
Holland, O. W
Eaglesham, D. J
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 13 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : ORNLCP96086
テクニカルリポート番号 : DE98 004113
テクニカルリポート番号 : CONF980528
Holding library: 国立国会図書館
Call No.: LS-DE98/004113
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005909114
http://id.ndl.go.jp/bib/000005909114
Bibliographic Record Category (NDL): 291