Segregation gettering by implantation-formed cavities and B-Si precipitates in silicon SAND971936C DE98 004109 CONF980528

Segregation gettering by implantation-formed cavities and B-Si precipitates in silicon

SAND971936C DE98 004109 CONF980528

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Material Type: 規格・テクニカルリポート類
Title: Segregation gettering by implantation-formed cavities and B-Si precipitates in silicon
Author/Editor: Myers, S. M
Petersen, G. A
Follstaedt, D. M
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND971936C
テクニカルリポート番号 : DE98 004109
テクニカルリポート番号 : CONF980528
Holding library: 国立国会図書館
Call No.: LS-DE98/004109
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005909117
http://id.ndl.go.jp/bib/000005909117
Bibliographic Record Category (NDL): 291