In situ reflectance and virtual interface analysis for compound semiconductor process control SAND980619C DE98 003343

In situ reflectance and virtual interface analysis for compound semiconductor process control

SAND980619C DE98 003343

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Material Type: 規格・テクニカルリポート類
Title: In situ reflectance and virtual interface analysis for compound semiconductor process control
Author/Editor: Breiland, W. G
Hou, H. Q
Hammons, B. E
Klem, J. F
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980619C
テクニカルリポート番号 : DE98 003343
Holding library: 国立国会図書館
Call No.: LS-DE98/003343
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005909202
http://id.ndl.go.jp/bib/000005909202
Bibliographic Record Category (NDL): 291