Hinged-pad test structure for sliding friction measurement in micromachining SAND981759C DE98 007268

Hinged-pad test structure for sliding friction measurement in micromachining

SAND981759C DE98 007268

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Material Type: 規格・テクニカルリポート類
Title: Hinged-pad test structure for sliding friction measurement in micromachining
Author/Editor: Boer, M. P
Redmond, J. M
Michalske, T. A
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981759C
テクニカルリポート番号 : DE98 007268
Holding library: 国立国会図書館
Call No.: LS-DE98/007268
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918071
http://id.ndl.go.jp/bib/000005918071
Bibliographic Record Category (NDL): 291