Linkage design effect on the reliability of surface micromachined microengines driving a load SAND981681C DE98 007173

Linkage design effect on the reliability of surface micromachined microengines driving a load

SAND981681C DE98 007173

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Material Type: 規格・テクニカルリポート類
Title: Linkage design effect on the reliability of surface micromachined microengines driving a load
Author/Editor: Tanner, D. M
Peterson, K. A
Irwin, L. W
Tangyunyong, P
Miller, W. M
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981681C
テクニカルリポート番号 : DE98 007173
Holding library: 国立国会図書館
Call No.: LS-DE98/007173
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918075
http://id.ndl.go.jp/bib/000005918075
Bibliographic Record Category (NDL): 291