Design tools and issues of silicon micromachined (MEMS) devices SAND981104C DE98 005696 CONF980810

Design tools and issues of silicon micromachined (MEMS) devices

SAND981104C DE98 005696 CONF980810

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Material Type: 規格・テクニカルリポート類
Title: Design tools and issues of silicon micromachined (MEMS) devices
Author/Editor: Davies, B. R
Rodgers, M. S
Montague, S
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981104C
テクニカルリポート番号 : DE98 005696
テクニカルリポート番号 : CONF980810
Holding library: 国立国会図書館
Call No.: LS-DE98/005696
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918172
http://id.ndl.go.jp/bib/000005918172
Bibliographic Record Category (NDL): 291