MEMS reliability: The challenge and the promise SAND980630C DE98 005641 CONF980558

MEMS reliability: The challenge and the promise

SAND980630C DE98 005641 CONF980558

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Material Type: 規格・テクニカルリポート類
Title: MEMS reliability: The challenge and the promise
Author/Editor: Miller, W. M
Tanner, D. M
Miller, S. L
Peterson, K. A
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980630C
テクニカルリポート番号 : DE98 005641
テクニカルリポート番号 : CONF980558
Holding library: 国立国会図書館
Call No.: LS-DE98/005641
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918255
http://id.ndl.go.jp/bib/000005918255
Bibliographic Record Category (NDL): 291