Adhesion of polysilicon microbeams in controlled humidity ambients SAND981034C DE98 005456

Adhesion of polysilicon microbeams in controlled humidity ambients

SAND981034C DE98 005456

Call No. (NDL): LS-DE98/005456
Bibliographic ID of National Diet Library: 000005918305

Material type: 規格・テクニカルリポート類

Author: Boer, M. Pほか

Publisher: -

Publication date: 1998

Material Format: Microform

Capacity, size, etc.: 8 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Adhesion of polysilicon microbeams in controlled humidity ambients
Author/Editor: Boer, M. P
Clews, P. J
Smith, B. K
Michalske, T. A
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981034C
テクニカルリポート番号 : DE98 005456
Holding library: 国立国会図書館
Call No.: LS-DE98/005456
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918305
http://id.ndl.go.jp/bib/000005918305
Bibliographic Record Category (NDL): 291