GaN etching in BCl(sub 3)Cl(sub 2) plasmas SAND981131C DE98 005455

GaN etching in BCl(sub 3)Cl(sub 2) plasmas

SAND981131C DE98 005455

Call No. (NDL): LS-DE98/005455
Bibliographic ID of National Diet Library: 000005918306

Material type: 規格・テクニカルリポート類

Author: Shul, R. Jほか

Publisher: -

Publication date: 1998

Material Format: Microform

Capacity, size, etc.: 9 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: GaN etching in BCl(sub 3)Cl(sub 2) plasmas
Author/Editor: Shul, R. J
Ashby, C. I. H
Willison, C. G
Zhang, L
Han, J
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981131C
テクニカルリポート番号 : DE98 005455
Holding library: 国立国会図書館
Call No.: LS-DE98/005455
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918306
http://id.ndl.go.jp/bib/000005918306
Bibliographic Record Category (NDL): 291