Comparison of dry-etch techniques for GaN, InN, and AlN SAND980335C DE98 003054

Comparison of dry-etch techniques for GaN, InN, and AlN

SAND980335C DE98 003054

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Material Type: 規格・テクニカルリポート類
Title: Comparison of dry-etch techniques for GaN, InN, and AlN
Author/Editor: Shul, R. J
Vawter, G. A
Willison, C. G
Bridges, M. M
Lee, J. W
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980335C
テクニカルリポート番号 : DE98 003054
Holding library: 国立国会図書館
Call No.: LS-DE98/003054
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918426
http://id.ndl.go.jp/bib/000005918426
Bibliographic Record Category (NDL): 291