Microelectro-optical devices in a 5-level polysilicon surface micromachining technology SAND981800C DE98 006148

Microelectro-optical devices in a 5-level polysilicon surface micromachining technology

SAND981800C DE98 006148

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Microelectro-optical devices in a 5-level polysilicon surface micromachining technology
Author/Editor: Smith, J. H
Rodgers, M. S
Sniegowski, J. J
Miller, S. L
Hetherington, D
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND981800C
テクニカルリポート番号 : DE98 006148
Holding library: 国立国会図書館
Call No.: LS-DE98/006148
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005918997
http://id.ndl.go.jp/bib/000005918997
Bibliographic Record Category (NDL): 291