Failure modes in surface micromachined microelectromechanical actuators SAND980382C DE98 003046

Failure modes in surface micromachined microelectromechanical actuators

SAND980382C DE98 003046

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Material Type: 規格・テクニカルリポート類
Title: Failure modes in surface micromachined microelectromechanical actuators
Author/Editor: Miller, S. L
Rodgers, M. S
LaVigne, G
Sniegowski, J. J
Clews, P
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND980382C
テクニカルリポート番号 : DE98 003046
Holding library: 国立国会図書館
Call No.: LS-DE98/003046
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005946046
http://id.ndl.go.jp/bib/000005946046
Bibliographic Record Category (NDL): 291