Fabrication and testing of optics for EUV projection lithography UCRLJC128290 DE98 058758

Fabrication and testing of optics for EUV projection lithography

UCRLJC128290 DE98 058758

Call No. (NDL): LS-DE98/058758
Bibliographic ID of National Diet Library: 000005946544

Material type: 規格・テクニカルリポート類

Author: Taylor, J

Publisher: -

Publication date: 1998

Material Format: Microform

Capacity, size, etc.: 6 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Fabrication and testing of optics for EUV projection lithography
Author/Editor: Taylor, J
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRLJC128290
テクニカルリポート番号 : DE98 058758
Holding library: 国立国会図書館
Call No.: LS-DE98/058758
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005946544
http://id.ndl.go.jp/bib/000005946544
Bibliographic Record Category (NDL): 291