Failure analysis for micro-electrical-mechanical systems (MEMS) SAND971733C DE97 007265

Failure analysis for micro-electrical-mechanical systems (MEMS)

SAND971733C DE97 007265

Call No. (NDL): LS-DE97/007265
Bibliographic ID of National Diet Library: 000005946699

Material type: 規格・テクニカルリポート類

Author: Peterson, K. Aほか

Publisher: -

Publication date: 1997

Material Format: Microform

Capacity, size, etc.: 12 p. (1 microfiche)

NDC: -

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Microform

Material Type: 規格・テクニカルリポート類
Title: Failure analysis for micro-electrical-mechanical systems (MEMS)
Author/Editor: Peterson, K. A
Tangyunyong, P
Barton, D. L
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND971733C
テクニカルリポート番号 : DE97 007265
Holding library: 国立国会図書館
Call No.: LS-DE97/007265
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005946699
http://id.ndl.go.jp/bib/000005946699
Bibliographic Record Category (NDL): 291