Micro machining of silicon by electrical discharge machining SME-MR01-237

Micro machining of silicon by electrical discharge machining

SME-MR01-237

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Material Type: 規格・テクニカルリポート類
Title: Micro machining of silicon by electrical discharge machining
Author/Editor: Liu, Weidong
Rahman, Mustafizur. Wong, Yoke San
Publication Date: 2001
Publication Date (W3CDTF): 2001
Extent: 7 p
Alternative Title: International machining & grinding. 4th. Conference. Troy, Mich. May 2001
Report No.: テクニカルリポート番号 : SME-MR01-237
Holding library: 国立国会図書館
Call No.: M-SME-MR01-237
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006097565
http://id.ndl.go.jp/bib/000006097565
Bibliographic Record Category (NDL): 291