Silicon bulk micromachining and nanomachining SME-EE01-322

Silicon bulk micromachining and nanomachining

SME-EE01-322

Call No. (NDL): M-SME-EE01-322
Bibliographic ID of National Diet Library: 000006097596

Material type: 規格・テクニカルリポート類

Author: Esashi, Masayoshi

Publisher: -

Publication date: 2001

Material Format: Paper

Capacity, size, etc.: 7 p

NDC: -

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Paper

Material Type: 規格・テクニカルリポート類
Title: Silicon bulk micromachining and nanomachining
Author/Editor: Esashi, Masayoshi
Publication Date: 2001
Publication Date (W3CDTF): 2001
Extent: 7 p
Report No.: テクニカルリポート番号 : SME-EE01-322
Holding library: 国立国会図書館
Call No.: M-SME-EE01-322
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006097596
http://id.ndl.go.jp/bib/000006097596
Bibliographic Record Category (NDL): 291