Subsurface damage measurement in silicon wafers by laser scattering SME-MS02-173

Subsurface damage measurement in silicon wafers by laser scattering

SME-MS02-173

Call No. (NDL): M-SME-MS02-173
Bibliographic ID of National Diet Library: 000006110099

Material type: 規格・テクニカルリポート類

Author: Zhang, J. Mほか

Publisher: -

Publication date: 2002

Material Format: Paper

Capacity, size, etc.: 8 p

NDC: -

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Paper

Material Type: 規格・テクニカルリポート類
Title: Subsurface damage measurement in silicon wafers by laser scattering
Author/Editor: Zhang, J. M
Sun, J. G
Pei, Z. J
Publication Date: 2002
Publication Date (W3CDTF): 2002
Extent: 8 p
Alternative Title: NAMRC. Conference. 30th. West Lafayette, Ind. May 2002
Report No.: テクニカルリポート番号 : SME-MS02-173
Holding library: 国立国会図書館
Call No.: M-SME-MS02-173
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006110099
http://id.ndl.go.jp/bib/000006110099
Bibliographic Record Category (NDL): 291