Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.

• Material Type: 図書
• Title: Proceedings of the Symposium on Etching for Pattern Definition / edited by Henry G. Hughes, Myron J. Rand.
• Author Heading: Hughes, Henry G.; Rand, Myron J.; Electrochemical Society.; Symposium on Etching for Pattern Definition (1976 : Washington, D.C.)
• Publication, Distribution, etc.: Princeton, N.J. : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
• Publication Date: c1976.
• Publication Date (W3CDTF): 1976
• Extent: vi, 203 p. : ill. ; 23 cm.
• Place of Publication (Country Code): US
• Text Language Code: eng
• Subject Heading: Semiconductors -- Etching -- Congresses.; Integrated circuits -- Congresses.; Metals -- Etching -- Congresses.
• LCC: TK7836
• DDC: 621.3815/2
• NDLC: ND371; ND386
• Note (General): Held at the spring, 1976, meeting of the Electrochemical Society.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND371-62
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000006344236; http://id.ndl.go.jp/bib/000006344236
• LC Control Number: 76009231; https://lccn.loc.gov/76009231
• Bibliographic Record Category (NDL): 211