図書

Developments in semiconductor microlithography. (Proceedings of the Society of Photo-Optical Instrumentation Engineers)

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Developments in semiconductor microlithography.

(Proceedings of the Society of Photo-Optical Instrumentation Engineers)

Call No. (NDL)
ND371-28
Bibliographic ID of National Diet Library
000006400347
Material type
図書
Author
Society of Photo-optical Instrumentation Engineers.ほか
Publisher
Society of Photo-Optical Instrumentation Engineers.
Publication date
1976.
Material Format
Paper
Capacity, size, etc.
ill. 28 cm.
NDC
-
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Notes on use

Note (General):

Vols. for 1976- are proceedings of seminars presented by the Society of Photo-Optical Instrumentation Engineers and the Northern California Microphoto...

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Paper

Material Type
図書
Publication Date
1976.
Publication Date (W3CDTF)
1976
Extent
ill. 28 cm.
Alternative Title
Semiconductor microlithography