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図書

Semiconductor microlithography / presented by the Society of Photo-optical Instrumentation Engineers. (1980: Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 221) (1981: Proceedings of SPIE--the International Society for Optical Engineering ; v. 275.)

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Semiconductor microlithography / presented by the Society of Photo-optical Instrumentation Engineers.

(1980: Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 221) (1981: Proceedings of SPIE--the International Society for Optical Engineering ; v. 275.)

Call No. (NDL)
ND371-28
Bibliographic ID of National Diet Library
000006409352
Material type
図書
Author
Society of Photo-optical Instrumentation Engineers.
Publisher
The Society
Publication date
1980-
Material Format
Paper
Capacity, size, etc.
v. : ill. ; 28 cm.
NDC
-
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Paper

Material Type
図書
Title
Semiconductor microlithography / presented by the Society of Photo-optical Instrumentation Engineers.
Series Title
1980: Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 221
1981: Proceedings of SPIE--the International Society for Optical Engineering ; v. 275.
Title Heading
Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 221.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 275.
Author Heading
Society of Photo-optical Instrumentation Engineers.
Publication, Distribution, etc.
Bellingham, Wash. : The Society
Publication Date
1980-
Publication Date (W3CDTF)
1980
Extent
v. : ill. ; 28 cm.
Place of Publication (Country Code)
US