Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems microform : standard reference materials / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick (NIST special publication ; 260-119)

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems microform : standard reference materials / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick

(NIST special publication ; 260-119)

Call No. (NDL): YCA-C 13.10:260-119
Bibliographic ID of National Diet Library: 000006578019

Material type: 図書

Author: Vezzetti, Carol Fほか

Publisher: -

Publication date: 1992

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Notes on use

Note (General)：: Distributed to depository libraries in microficheShipping list no.: 92-2587-MPhysical description for original version: 1 v

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Microform

Material Type: 図書
Title: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems microform : standard reference materials / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick
Series Title: NIST special publication ; 260-119
Author Heading: Vezzetti, Carol F
Varner, Ruth N
Potzick, James E
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 1992
Extent: microfiche
Size: 11 × 15 cm
Alternative Title: Standard reference materials
Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Microscopes -- Calibration -- Standards
Integrated circuits -- Masks -- Measurement
Chromium -- Spectra -- Standards
Note (General): Distributed to depository libraries in microfiche
Shipping list no.: 92-2587-M
Physical description for original version: 1 v
Note (Original Version): 原資料の出版事項: Gaithersburg, MD ; [Springfield, VA : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology : Order from National Technical Information Service, 1992]
SUPTDOC番号: C 13.10: 260-119
テクニカルリポート番号: NIST/SP-260/119
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:260-119
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006578019
http://id.ndl.go.jp/bib/000006578019
OCLC No.: 27701163
https://www.worldcat.org/oclc/27701163
Bibliographic Record Category (NDL): 281