Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.] (Standard reference materials) (NIST special publication ; 260-109)

Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.]

(Standard reference materials) (NIST special publication ; 260-109)

Call No. (NDL): YCA-C 13.10:260-109
Bibliographic ID of National Diet Library: 000006578573

Material type: 図書

Author: Candela, G. A. (George A.)ほか

Publisher: -

Publication date: 1988

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Note (General)：: Distributed to depository libraries in microficheNo longer available for sale by the Supt. of Docs"Issued October 1988."...

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Material Type: 図書
Title: Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.]
Series Title: Standard reference materials
NIST special publication ; 260-109
Author Heading: Candela, G. A. (George A.)
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 1988
Extent: microfiche
Size: 11 × 15 cm
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Ellipsometry -- Evaluation -- Mathematical models
Refractive index
Silica -- United States
Silicon
Note (General): Distributed to depository libraries in microfiche
No longer available for sale by the Supt. of Docs
"Issued October 1988."
Physical description for original version: x, 37 p. : 28 cm
Note (Bibliography): Includes bibliographical references
Note (Original Version): 原資料の出版事項: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, [1988]
SUPTDOC番号: C 13.10: 260-109
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:260-109
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006578573
http://id.ndl.go.jp/bib/000006578573
OCLC No.: 20609002
https://www.worldcat.org/oclc/20609002
Bibliographic Record Category (NDL): 281