Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden ... [et al.] (Semiconductor measurement technology) (NIST special publication ; 400-81)

Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden ... [et al.]

(Semiconductor measurement technology) (NIST special publication ; 400-81)

Call No. (NDL): YCA-C 13.10:400-81
Bibliographic ID of National Diet Library: 000006579689

Material type: 図書

Author: Gladden, Warren Kほか

Publisher: -

Publication date: 1988

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Note (General)：: Distributed to depository libraries in microficheG.P.O. sales statement incorrect in publication"November 1988."...

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Material Type: 図書
Title: Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / Warren K. Gladden ... [et al.]
Series Title: Semiconductor measurement technology
NIST special publication ; 400-81
Author Heading: Gladden, Warren K
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 1988
Extent: microfiche
Size: 11 × 15 cm
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Semiconductors -- Measurement -- Data processing
Silicon -- Spectra
Infrared spectroscopy -- Computer programs
Note (General): Distributed to depository libraries in microfiche
G.P.O. sales statement incorrect in publication
"November 1988."
Physical description for original version: iii, 66 p. : 28 cm
Note (Bibliography): Includes bibliographical references
Note (Original Version): 原資料の出版事項: Gaithersburg, MD ; [Springfield, VA : U.S. Dept. of Commerce, National Institute of Standards and Technology : Order from National Technical Information Service, 1988]
SUPTDOC番号: C 13.10: 400-81
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:400-81
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006579689
http://id.ndl.go.jp/bib/000006579689
OCLC No.: 20378619
https://www.worldcat.org/oclc/20378619
Bibliographic Record Category (NDL): 281