Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology" (NIST special publication ; 400-92)

Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"

(NIST special publication ; 400-92)

Call No. (NDL): YCA-C 13.10:400-92
Bibliographic ID of National Diet Library: 000006590357

Material type: 図書

Author: Bullis, W. Murray, 1930-ほか

Publisher: -

Publication date: 1993

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Notes on use

Note (General)：: Distributed to depository libraries in microficheShipping list no.: 94-0057-PPaper version no longer for sale by the Supt. of Docs...

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Microform

Material Type: 図書
Title: Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"
Series Title: NIST special publication ; 400-92
Author Heading: Bullis, W. Murray, 1930-
National Institute of Standards and Technology (U.S.) . Semiconductor Electronics Division
Publication Date (W3CDTF): 1993
Extent: microfiche
Size: 11 × 15 cm
Alternative Title: Evolution of silicon materials characteristics, lessons learned for improved manufacturing
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Semiconductors
Semiconductor wafers
Integrated circuits -- Wafer-scale integration -- United States
Note (General): Distributed to depository libraries in microfiche
Shipping list no.: 94-0057-P
Paper version no longer for sale by the Supt. of Docs
"July 1993."
Physical description for original version: iv, 27, 201-211 p. : 28 cm
Note (Bibliography): Includes bibliographical references (p. 23-25)
Note (Original Version): 原資料の出版事項: Gaithersburg, MD ; Washington, D.C. : U.S. Dept. of Commerce, National Institute of Standards and Technology : For sale by the Supt. of Docs., U.S. G.P.O., 1993
SUPTDOC番号: C 13.10: 400-92
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:400-92
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006590357
http://id.ndl.go.jp/bib/000006590357
OCLC No.: 30143803
https://www.worldcat.org/oclc/30143803
Bibliographic Record Category (NDL): 281