User's manual for the program MONSEL-1 [microform] : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx (Semiconductor measurement technology) (NIST special publication ; 400-95)

User's manual for the program MONSEL-1 [microform] : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx

(Semiconductor measurement technology) (NIST special publication ; 400-95)

Call No. (NDL): YCA-C 13.10:400-95
Bibliographic ID of National Diet Library: 000006596075

Material type: 図書

Author: Lowney, J. R. (Jeremiah Ralph) , 1946-ほか

Publisher: -

Publication date: 1994

Material Format: Microform

Capacity, size, etc.: microfiche ; 11 × 15 cm

NDC: -

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Note (General)：: Distributed to depository libraries in microficheShipping list no.: 94-0956-M"August 1994."...

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Material Type: 図書
Title: User's manual for the program MONSEL-1 [microform] : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx
Series Title: Semiconductor measurement technology
NIST special publication ; 400-95
Author Heading: Lowney, J. R. (Jeremiah Ralph) , 1946-
Marx, Egon
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 1994
Extent: microfiche
Size: 11 × 15 cm
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Scanning electron microscopy -- Computer programs -- Handbooks, manuals, etc
Electrons -- Scattering -- Computer simulation -- Handbooks, manuals, etc
Monte Carlo method -- Computer programs -- Handbooks, manuals, etc
Note (General): Distributed to depository libraries in microfiche
Shipping list no.: 94-0956-M
"August 1994."
Physical description for original version: iv, 39 p. : 28 cm
Note (Bibliography): Includes bibliographical references
Note (Original Version): 原資料の出版事項: Gaithersburg, MD ; Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology : For sale by the Supt. of Docs., U.S. G.P.O., 1994
SUPTDOC番号: C 13.10: 400-95
GPO管理番号: 0247 (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.10:400-95
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006596075
http://id.ndl.go.jp/bib/000006596075
OCLC No.: 31921202
https://www.worldcat.org/oclc/31921202
Bibliographic Record Category (NDL): 281