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- Material Type
- 図書
- Series Title
- Author Heading
- Publication Date (W3CDTF)
- 1997
- Extent
- microfiche
- Size
- 11 × 15 cm
- Alternative Title
- Micro mechanical voltage tunable Fabry Perot filters formed in (111) silicon
- Place of Publication (Country Code)
- US
- Text Language Code
- eng