MEMS length and strain measurements using an optical interferometer [microform] / J.C. Marshall (NISTIR ; 6779)

MEMS length and strain measurements using an optical interferometer [microform] / J.C. Marshall

(NISTIR ; 6779)

Notes on use

Note (General)：: "August 2, 2001."Shipping list no.: 2002-0384-MPhysical description for original version: vi, 81 p. : 28 cm

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Material Type: 図書
Title: MEMS length and strain measurements using an optical interferometer [microform] / J.C. Marshall
Series Title: NISTIR ; 6779
Author Heading: Marshall, J. C. (Janet C.)
National Institute of Standards and Technology (U.S.)
Publication Date (W3CDTF): 2001
Extent: microfiche
Size: 11 × 15 cm
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Subject Heading: Microelectromechanical systems
Interferometers
Note (General): "August 2, 2001."
Shipping list no.: 2002-0384-M
Physical description for original version: vi, 81 p. : 28 cm
Note (Bibliography): Includes bibliographical references (p. 42-44)
Note (Original Version): 原資料の出版事項: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
SUPTDOC番号: C 13.58: 6779
GPO管理番号: 0247-D (MF)
Holding library: 国立国会図書館
Call No.: YCA-C 13.58:6779
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006642277
http://id.ndl.go.jp/bib/000006642277
OCLC No.: 50255496
https://www.worldcat.org/oclc/50255496
Bibliographic Record Category (NDL): 281