Development of nano-scale processing with the tunneling electrons from a scanning tunneling microscope (STM) under atomospheric or reduced pressure トンネル電子線を用いた大気圧・低真空環境下でのナノプロセシングの開発

Development of nano-scale processing with the tunneling electrons from a scanning tunneling microscope (STM) under atomospheric or reduced pressure トンネル電子線を用いた大気圧・低真空環境下でのナノプロセシングの開発

Call No. (NDL): Y151-H03650539
Bibliographic ID of National Diet Library: 000006983845

Material type: 図書

Author: 寺嶋和夫, 東京大学

Publisher: -

Publication date: 1991-1992

Material Format: Paper

Capacity, size, etc.: -

NDC: -

View All

Notes on use

Note (General)：: 文部省科学研究費補助金研究成果報告書

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
Title: Development of nano-scale processing with the tunneling electrons from a scanning tunneling microscope (STM) under atomospheric or reduced pressure トンネル電子線を用いた大気圧・低真空環境下でのナノプロセシングの開発
Title Transcription: Development of nano-scale processing with the tunneling electrons from a scanning tunneling microscope (STM) under atomospheric or reduced pressure トンネルデンシセンオモチイタタイキアツ・テイシンクウカンキョウカデノナノプロセシングノカイハツ
Author/Editor: 寺嶋和夫, 東京大学
Author Heading: 寺嶋, 和夫, 1959- テラシマ, カズオ, 1959- ( 00934634 )Authorities
Publication Date: 1991-1992
Publication Date (W3CDTF): 1991
1992
Extent: 冊
Additional Title: 研究種目一般研究(C)
Subject Heading: STM STM
ナノプロセシング用基板ナノプロセシングヨウキバン
メタンー水素系CVD メタンースイソケイCVD
semi in-situ 評価/プロセシング SEMIIN-SITUヒヨウカ/プロセシング
NDLC: Y151
Note (General): 文部省科学研究費補助金研究成果報告書
Research Project No. of Grants-in-Aid for Scientific Research: 03650539
Holding library: 国立国会図書館
Call No.: Y151-H03650539
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006983845
http://id.ndl.go.jp/bib/000006983845
Bibliographic Record Category (NDL): 214